The Vertex Single Sensor measures the ion energy distribution as a function of aspect ratio, ion energy, ion flux, negative ions and Vdc at a surface inside a plasma. The Vertex Single Sensor is increasingly used in many applications in industry and research, such as plasma etching, ion beams, and plasma sputtering for plasma characterisation and plasma interaction analysis. The Vertex Single Sensor saves the user valuable time in confirming models, developing new processes and in experiments that use plasma, plasma tool design and plasma research.
The Vertex Single Sensor is housed in a 19" rack mounted electronics unit, vacuum feed-through, and a sensor holder located anywhere inside a plasma or beam chamber. The location can even be a RF or DC powered electrode and can use a replaceable Button Probe sensor. The electronics unit connects to a laptop or a PC and uses the Vertex intelligent software suite. The Vertex Single Sensor has a number of holder options ranging from 50mm to 450mm and will depend on the users application. Users can select a 50mm sensor and physically move the sensor to measure in different chamber locations. In some applications the user can select a sensor holder to match the size of their substrate holder or their electrode and in this case the sensor is located at a specific location such as the center of the holder plate.
The Vertex Single Sensor allows users to change their plasma input parameters or beam source location in real time to find the optimum ion aspect ratio for a specific total ion energy and ion flux in their application. The system also takes useful measurements such as ion energy, temperature, voltage direct current and the energy and flux of negative ions. While the Vertex System is not used on the process side of plasma manufacturing it has been used to measure side wall pattern in etch, beam divergence, elastic scattering to assist with chamber to chamber matching, fault detection, researching new processes, in an offline environment. For the first time, by directly measuring ion angle the Vertex System helps eliminate the need for a trial and error approach saving time and money.